Special Issues/Internal Stresses in Surface Treated Layers. Internal Stress in Thin Films Deposited by Sputtering.
نویسندگان
چکیده
منابع مشابه
AlNXOY THIN FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING
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ژورنال
عنوان ژورنال: Journal of the Surface Finishing Society of Japan
سال: 1992
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.43.635